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Calibrating your standards enables connecting them to the international system of units, while ensuring the traceability of your measurements. This approach serves to satisfy the requirements of your quality assurance protocol.

Proposed calibration services

Surface depth standards

Calibration of a normalized Type A depth standard (according to ISO 5436-1) on a profilometer fitted with two interferometric axes and a contact feeler.

  • Determination of depth d on an average of 5 measurements spread over the standard surface.
  • Optimal measurement uncertainty: 25 nm + 25.10-6.d (k=2).

Surface roughness standards

Calibration of a normalized Type C or D roughness standard (according to ISO 5436-1) on a profilometer fitted with two interferometric axes and a contact feeler.
Measurement range: 0.1 µm ≤ Ra ≤ 20 µm
Conditions for determining the amplitude settings (ISO 4287) or else the pattern settings (ISO 12085):

  • Total profile filtering (wavelength ʎs filter).
  • In the case of amplitude settings, 12 measurements will be performed, spread over the standard surface with an evaluation length equal to 5 base lengths.
  • In the case of pattern settings, measurements are to be conducted on at least 3 distinct patterns.

Optimal measurement uncertainties: 10 nm + 10.10-3.Ra for the average settings, 30 nm + 10.10-3.Rz for the amplitude settings, and 0.5 µm for the spacing settings (k=2).

Accreditation details

  • COFRAC Accreditation No. 2-35 (Paris site)

List of sites and scopes available on www.cofrac.fr